Region | 100 μm 3D | 400 μm 3D–DS | 400 μm 2D–DS | |||
---|---|---|---|---|---|---|
Range (°) | Linearity | Range (°) | Linearity | Range (°) | Linearity | |
1 | 102 | 0.92 | 94 | 0.93 | 87 | 0.93 |
2 | 170 | 0.99 | 167 | 0.99 | 166 | 0.99 |
3 | 133 | 0.98 | 136 | 0.97 | 130 | 0.97 |
4 | 116 | 0.90 | 104 | 0.96 | 92 | 0.97 |
5 | 114 | 0.98 | 109 | 0.99 | 108 | 0.99 |
6 | 143 | 0.88 | 117 | 0.97 | 113 | 0.98 |
7 | 114 | 0.98 | 115 | 0.98 | 114 | 0.98 |
8 | 154 | 0.99 | 144 | 0.99 | 147 | 0.99 |
9 | 146 | 0.97 | 150 | 0.97 | 155 | 0.98 |
10 | 110 | 0.96 | 105 | 0.97 | 106 | 0.97 |
11 | 131 | 0.98 | 108 | 0.98 | 106 | 0.98 |
12 | 126 | 0.99 | 123 | 0.99 | 119 | 0.99 |
13 | 119 | 0.99 | 100 | 0.98 | 98 | 0.98 |
14 | 147 | 0.96 | 143 | 0.98 | 120 | 0.97 |
15 | 122 | 0.98 | 112 | 0.99 | 98 | 1.00 |
16 | 131 | 0.99 | 126 | 0.99 | 121 | 0.99 |